Clean Rooms

IPHYS has extensive facilities for micro- and nano-fabrication and characterization, including specialized III/V lab clean rooms, thin films deposition, dry etching, lithography, electron and atomic force microscopy, and photo- and cathodo-luminescence. These are also open for use by interested researchers from other Institutes at EPFL.

Our facilities

Situation in PH Building  –>–>

Useful links: Center of Micronanotechnology CMI